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Here are 40000 points (x,y) on the wafer, how to arrange them into the right row/column, in order to form wafer map?

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Hello all friends,

 

I want to arrange all these phisical points into a logical map, but how many rows and column are not known in advance, we just know:

1. seperation can be given, for example stepX(width) =390.7,StepY(heigh) =318.8
2. some of the points' posX and posY are scaned several times, so deleting redundant data needed.

What's the method to solve this problem?

 

posX posY

60346 79682.2
59928.4 78089.2
60724 79044.4
61484.2 78085.9
59948.7 79045.6
61479 77767.5
60339.5 79365.1
56052.5 79061.7
56030.9 78113.6
56428.6 78425.4
56436.5 78745.9
57201.8 78106.2
58781.1 79374.2
56448.4 79702.1
56825.3 79066
56440.2 79059.4
57613.9 79700.8
56840.8 79699.7
57989.3 78739.6
58778.9 79692
58772 79048.6
58004.9 79692.7
56057.1 79703.9
57224.6 79381.9
56821.8 78747.1
56422.6 78111.7
57611.8 79379.9
56047.5 78747.2
56827.9 79385.8
56416.1 77793.6
57194.1 77787.8
56048.2 79385.7
58383.6 79060.5
56444.7 79384.2
57587.1 78109.3
......

 

Below is a small example to demostrate this case,  just with hundreds of points

 

 

From sacnning the wafer:
1.JPG

 

 

To form the map:
2.JPG

 

 

 Thanks very much,

Deho


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